Dual exposure, two-photon, conformal phase mask lithography for three dimensional silicon inverse woodpile photonic crystals

Shir, Daniel J.; Nelson, Erik C.; Chanda, Debashis; Brzezinski, Andrew; Braun, Paul V.; Rogers, John A.; Wiltzius, Pierre

doi:10.1116/1.3456181

Title: Dual exposure, two-photon, conformal phase mask lithography for three dimensional silicon inverse woodpile photonic crystals

Journal Article · Thu Jul 01 00:00:00 EDT 2010 · Journal of Vacuum Science and Technology B

DOI:https://doi.org/10.1116/1.3456181· OSTI ID:1380396

Shir, Daniel J.; Nelson, Erik C.; Chanda, Debashis; Brzezinski, Andrew; Braun, Paul V.; Rogers, John A.; Wiltzius, Pierre

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Light-Material Interactions in Energy Conversion (LMI)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

DOE Contract Number:: SC0001293

OSTI ID:: 1380396

Journal Information:: Journal of Vacuum Science and Technology B, Vol. 28, Issue 4; Related Information: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory; ISSN 2166-2746

Publisher:: American Vacuum Society/AIP

Country of Publication:: United States

Language:: English

References (26)

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Three-Dimensional Nanofabrication with Elastomeric Phase Masks Shir, Daniel J.; Jeon, Seokwoo; Liao, Hongwei The Journal of Physical Chemistry B, Vol. 111, Issue 45 https://doi.org/10.1021/jp074093j	journal	October 2007
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Three-dimensional micro/nanoscale architectures: fabrication and applications Xu, Quan; Lv, Yunzu; Dong, Chenbo Nanoscale, Vol. 7, Issue 25 https://doi.org/10.1039/c5nr02048d	journal	January 2015
25th Anniversary Article: Ordered Polymer Structures for the Engineering of Photons and Phonons Lee, Jae-Hwang; Koh, Cheong Yang; Singer, Jonathan P. Advanced Materials, Vol. 26, Issue 4 https://doi.org/10.1002/adma.201303456	journal	December 2013
Ultrafast laser processing of materials: a review Phillips, Katherine C.; Gandhi, Hemi H.; Mazur, Eric Advances in Optics and Photonics, Vol. 7, Issue 4 https://doi.org/10.1364/aop.7.000684	journal	January 2015
Rapid and Large‐Scale Fabrication of Full Color Woodpile Photonic Crystals via Interference from a Conformal Multilevel Phase Mask Nam, Sang‐Hyeon; Park, Junyong; Jeon, Seokwoo Advanced Functional Materials, Vol. 29, Issue 44 https://doi.org/10.1002/adfm.201904971	journal	August 2019
Conformable Solid-Index Phase Masks Composed of High-Aspect-Ratio Micropillar Arrays and Their Application to 3D Nanopatterning Park, Junyong; Park, Jae Hong; Kim, Eunhye Advanced Materials, Vol. 23, Issue 7 https://doi.org/10.1002/adma.201003885	journal	January 2011
Fabrication of Nanoshell-Based 3D Periodic Structures by Templating Process using Solution-derived ZnO Araki, Shinji; Ishikawa, Yasuaki; Wang, Xudongfang Nanoscale Research Letters, Vol. 12, Issue 1 https://doi.org/10.1186/s11671-017-2186-6	journal	June 2017

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