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Controlled optical properties via chemical composition tuning in molybdenum-incorporated β-Ga2O3 nanocrystalline films

Journal Article · · Chemical Physics Letters
 [1];  [2];  [3];  [1]
  1. Univ. of Texas, El Paso, TX (United States). Dept. of Mechanical Engineering
  2. Univ. of Texas, El Paso, TX (United States). Dept. of Mechanical Engineering; Pacific Northwest National Lab. (PNNL), Richland, WA (United States). Environmental Molecular Sciences Lab. (EMSL)
  3. Pacific Northwest National Lab. (PNNL), Richland, WA (United States). Environmental Molecular Sciences Lab. (EMSL)

Here, an approach is presented to design refractory-metal incorporated Ga2O3-based materials with controlled structural and optical properties. The molybdenum (Mo)-content in Ga2O3 was varied from 0 to 11 at% in the sputter-deposited Ga-Mo-O films. Molybdenum was found to significantly affect the structure and optical properties. While low Mo-content (≤4 at%) results in the formation of single-phase (β-Ga2O3), higher Mo-content results in amorphization. Chemically-induced band gap variability (Eg ~ 1 eV) coupled with structure-modification indicates the electronic-structure changes in Ga-Mo-O. The linear relationship between chemical-composition and optical properties suggests that tailoring the optical-quality and performance of Ga-Mo-O films is possible by tuning the Mo-content.

Research Organization:
Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
Sponsoring Organization:
USDOE Office of Science (SC); National Science Foundation (NSF)
Grant/Contract Number:
AC05-76RL01830
OSTI ID:
1368411
Alternate ID(s):
OSTI ID: 1576817
OSTI ID: 22927142
OSTI ID: 1390408
Journal Information:
Chemical Physics Letters, Journal Name: Chemical Physics Letters Journal Issue: C Vol. 684; ISSN 0009-2614
Publisher:
ElsevierCopyright Statement
Country of Publication:
United States
Language:
English

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Cited By (3)

Mechanical Properties of Nanocrystalline and Amorphous Gallium Oxide Thin Films journal August 2018
Effect of Ti doping on the crystallography, phase, surface/interface structure and optical band gap of Ga2O3 thin films journal May 2019
Nano-structured phases of gallium oxide (GaOOH, α-Ga2O3, β-Ga2O3, γ-Ga2O3, δ-Ga2O3, and ε-Ga2O3): fabrication, structural, and electronic structure investigations journal February 2020

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