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Controlled optical properties via chemical composition tuning in molybdenum-incorporated β-Ga 2 O 3 nanocrystalline films

Journal Article · · Chemical Physics Letters

An approach is presented to design refractory-metal incorporated Ga2O3-based materials with controlled structural and optical properties. The molybdenum (Mo)-content in Ga2O3 was varied from 0 to 11 at% in the sputter-deposited Ga-Mo-O films. Molybdenum was found to significantly affect the structure and optical properties. While low Mo-content (≤4 at%) results in the formation of single-phase (β-Ga2O3), higher Mo-content results in amorphization. Chemically-induced band gap variability (Eg~1 eV) coupled with structure-modification indicates the electronic-structure changes in Ga-Mo-O. The linear relationship between chemical-composition and optical properties suggests that tailoring the optical-quality and performance of Ga-Mo-O films is possible by tuning the Mo-content.

Research Organization:
Pacific Northwest National Laboratory (PNNL), Richland, WA (US), Environmental Molecular Sciences Laboratory (EMSL)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-76RL01830
OSTI ID:
1390408
Report Number(s):
PNNL-SA-127814; 46698; KP1704020
Journal Information:
Chemical Physics Letters, Journal Name: Chemical Physics Letters Journal Issue: C Vol. 684; ISSN 0009-2614
Publisher:
Elsevier
Country of Publication:
United States
Language:
English

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Cited By (3)

Mechanical Properties of Nanocrystalline and Amorphous Gallium Oxide Thin Films journal August 2018
Effect of Ti doping on the crystallography, phase, surface/interface structure and optical band gap of Ga2O3 thin films journal May 2019
Nano-structured phases of gallium oxide (GaOOH, α-Ga2O3, β-Ga2O3, γ-Ga2O3, δ-Ga2O3, and ε-Ga2O3): fabrication, structural, and electronic structure investigations journal February 2020

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