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Title: Sputtering of pure boron using a magnetron without a radio-frequency supply

Authors:
 [1]; ORCiD logo [2]; ORCiD logo [3];  [1]
  1. Institute of High Current Electronics SB RAS, 2/3 Academichesky Ave., Tomsk 634055, Russia, Tomsk State University of Control Systems and Radioelectronics, 40 Lenin Ave., Tomsk 634050, Russia
  2. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
  3. Institute of High Current Electronics SB RAS, 2/3 Academichesky Ave., Tomsk 634055, Russia
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1361821
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Journal Article: Publisher's Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 88; Journal Issue: 4; Related Information: CHORUS Timestamp: 2018-02-14 20:23:53; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Oks, Efim, Anders, André, Nikolaev, Alexey, and Yushkov, Yury. Sputtering of pure boron using a magnetron without a radio-frequency supply. United States: N. p., 2017. Web. doi:10.1063/1.4980149.
Oks, Efim, Anders, André, Nikolaev, Alexey, & Yushkov, Yury. Sputtering of pure boron using a magnetron without a radio-frequency supply. United States. doi:10.1063/1.4980149.
Oks, Efim, Anders, André, Nikolaev, Alexey, and Yushkov, Yury. Sat . "Sputtering of pure boron using a magnetron without a radio-frequency supply". United States. doi:10.1063/1.4980149.
@article{osti_1361821,
title = {Sputtering of pure boron using a magnetron without a radio-frequency supply},
author = {Oks, Efim and Anders, André and Nikolaev, Alexey and Yushkov, Yury},
abstractNote = {},
doi = {10.1063/1.4980149},
journal = {Review of Scientific Instruments},
number = 4,
volume = 88,
place = {United States},
year = {Sat Apr 01 00:00:00 EDT 2017},
month = {Sat Apr 01 00:00:00 EDT 2017}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record at 10.1063/1.4980149

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