Model mismatch analysis and compensation for modal phase measuring deflectometry
- Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
- Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Sichuan Univ., Chengdu (China). School of Aeronautics and Astronautics
- Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Chinese Academy of Sciences (CAS), Shanghai (China). Shanghai Inst. of Applied Physics; Univ. of Chinese Academy of Sciences, Beijing (China)
- Arizona Optical Systems, Tucson, AZ (United States)
The correspondence residuals due to the discrepancy between the reality and the shape model in use are analyzed for the modal phase measuring deflectometry. Slope residuals are calculated from these discrepancies between the modal estimation and practical acquisition. Since the shape mismatch mainly occurs locally, zonal integration methods which are good at dealing with local variations are used to reconstruct the height residual for compensation. Finally, results of both simulation and experiment indicate the proposed height compensation method is effective, which can be used as a post-complement for the modal phase measuring deflectometry.
- Research Organization:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- Contributing Organization:
- Sichuan Univ., Chengdu (China); Arizona Optical Systems, Tucson, AZ (United States); Univ. of Chinese Academy of Sciences, Beijing (China); Chinese Academy of Sciences (CAS), Shanghai (China)
- Grant/Contract Number:
- AC02-98CH10886
- OSTI ID:
- 1354707
- Report Number(s):
- BNL-113807-2017-JA
- Journal Information:
- Optics Express, Vol. 25, Issue 2; ISSN 1094-4087
- Publisher:
- Optical Society of America (OSA)Copyright Statement
- Country of Publication:
- United States
- Language:
- English
Cited by: 14 works
Citation information provided by
Web of Science
Web of Science
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