Modal phase measuring deflectometry

Huang, Lei; Xue, Junpeng; Gao, Bo; McPherson, Chris; Beverage, Jacob; Idir, Mourad

doi:10.1364/OE.24.024649

Title: Modal phase measuring deflectometry

Journal Article · Fri Oct 14 00:00:00 EDT 2016 · Optics Express

DOI:https://doi.org/10.1364/OE.24.024649· OSTI ID:1341707

Huang, Lei ^[1]; Xue, Junpeng ^[2]; Gao, Bo ^[3]; McPherson, Chris ^[4]; Beverage, Jacob ^[4]; Idir, Mourad ^[1]

Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Sichuan Univ., Chengdu (China). School of Aeronautics and Astronautics
Brookhaven National Lab. (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II); Chinese Academy of Sciences (CAS), Shanghai (China). Shanghai Inst. of Applied Physics; Univ. of Chines e Academy of Sciences , Beijing (China)
Arizona Optical Systems, Tucson, AZ (United States)

Here in this work, a model based method is applied to phase measuring deflectometry, which is named as modal phase measuring deflectometry. The height and slopes of the surface under test are represented by mathematical models and updated by optimizing the model coefficients to minimize the discrepancy between the reprojection in ray tracing and the actual measurement. The pose of the screen relative to the camera is pre-calibrated and further optimized together with the shape coefficients of the surface under test. Simulations and experiments are conducted to demonstrate the feasibility of the proposed approach.

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Research Organization:: Brookhaven National Lab. (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0012704

OSTI ID:: 1341707

Report Number(s):: BNL-113457-2017-JA; OPEXFF

Journal Information:: Optics Express, Vol. 24, Issue 21; ISSN 1094-4087

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 62 works

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References (28)

Principles of interference microscopy for the measurement of surface topography de Groot, Peter Advances in Optics and Photonics, Vol. 7, Issue 1 https://doi.org/10.1364/AOP.7.000001	journal	January 2015
Overview of three-dimensional shape measurement using optical methods Brown, Gordon M. Optical Engineering, Vol. 39, Issue 1 https://doi.org/10.1117/1.602438	journal	January 2000
Phase measuring deflectometry: a new approach to measure specular free-form surfaces Knauer, Markus C.; Kaminski, Jurgen; Hausler, Gerd Photonics Europe, SPIE Proceedings https://doi.org/10.1117/12.545704	conference	September 2004
Reflection grating photogrammetry: a technique for absolute shape measurement of specular free-form surfaces Petz, Marcus; Tutsch, Rainer Optics & Photonics 2005, SPIE Proceedings https://doi.org/10.1117/12.617325	conference	September 2005
High-resolution 3D shape measurement on specular surfaces by fringe reflection Bothe, Thorsten; Li, Wansong; von Kopylow, Christoph Photonics Europe, SPIE Proceedings https://doi.org/10.1117/12.545987	conference	September 2004
Deflectometry challenges interferometry: the competition gets tougher! Faber, Christian; Olesch, Evelyn; Krobot, Roman SPIE Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.957465	conference	September 2012
3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry Tang, Yan; Su, Xianyu; Liu, Yuankun Optics Express, Vol. 16, Issue 19 https://doi.org/10.1364/OE.16.015090	journal	January 2008
Dynamic three-dimensional sensing for specular surface with monoscopic fringe reflectometry Huang, Lei; Ng, Chi Seng; Asundi, Anand Krishna Optics Express, Vol. 19, Issue 13 https://doi.org/10.1364/OE.19.012809	journal	January 2011
Software configurable optical test system: a computerized reverse Hartmann test Su, Peng; Parks, Robert E.; Wang, Lirong Applied Optics, Vol. 49, Issue 23 https://doi.org/10.1364/AO.49.004404	journal	January 2010
Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach Su, Peng; Wang, Yuhao; Burge, James H. Optics Express, Vol. 20, Issue 11 https://doi.org/10.1364/OE.20.012393	journal	January 2012
X-ray mirror metrology using SCOTS/deflectometry Huang, Run; Su, Peng; Burge, James H. SPIE Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.2024500	conference	September 2013
A carrier removal method in phase measuring deflectometry based on the analytical carrier phase description Yue, Huimin; Wu, Yuxiang; Zhao, Biyu Optics Express, Vol. 21, Issue 19 https://doi.org/10.1364/OE.21.021756	journal	January 2013
Instrument transfer function of slope measuring deflectometry systems Su, Tianquan; Maldonado, Alejandro; Su, Peng Applied Optics, Vol. 54, Issue 10 https://doi.org/10.1364/AO.54.002981	journal	January 2015
Comparison of two-dimensional integration methods for shape reconstruction from gradient data Huang, Lei; Idir, Mourad; Zuo, Chao Optics and Lasers in Engineering, Vol. 64 https://doi.org/10.1016/j.optlaseng.2014.07.002	journal	January 2015
Shape reconstruction from gradient data Ettl, Svenja; Kaminski, Jürgen; Knauer, Markus C. Applied Optics, Vol. 47, Issue 12 https://doi.org/10.1364/AO.47.002091	journal	January 2008
Fast full-field out-of-plane deformation measurement using fringe reflectometry Huang, Lei; Seng Ng, Chi; Krishna Asundi, Anand Optics and Lasers in Engineering, Vol. 50, Issue 4 https://doi.org/10.1016/j.optlaseng.2011.05.006	journal	April 2012
Absolute optical surface measurement with deflectometry Li, Wansong; Sandner, Marc; Gesierich, Achim SPIE Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.928690	conference	September 2012
Mirror Surface Reconstruction from a Single Image Liu, Miaomiao; Hartley, Richard; Salzmann, Mathieu IEEE Transactions on Pattern Analysis and Machine Intelligence, Vol. 37, Issue 4 https://doi.org/10.1109/TPAMI.2014.2353622	journal	April 2015
Flexible geometrical calibration for fringe-reflection 3D measurement Xiao, Yong-Liang; Su, Xianyu; Chen, Wenjing Optics Letters, Vol. 37, Issue 4 https://doi.org/10.1364/OL.37.000620	journal	January 2012
Iterative optimization calibration method for stereo deflectometry Ren, Hongyu; Gao, Feng; Jiang, Xiangqian Optics Express, Vol. 23, Issue 17 https://doi.org/10.1364/OE.23.022060	journal	January 2015
High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry Huang, Run; Su, Peng; Burge, James H. Optical Engineering, Vol. 54, Issue 8 https://doi.org/10.1117/1.OE.54.8.084103	journal	August 2015
Modal wavefront reconstruction from its gradient Mochi, Iacopo; Goldberg, Kenneth A. Applied Optics, Vol. 54, Issue 12 https://doi.org/10.1364/AO.54.003780	journal	January 2015
Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms Dai, Fengzhao; Tang, Feng; Wang, Xiangzhao Applied Optics, Vol. 51, Issue 21 https://doi.org/10.1364/AO.51.005028	journal	January 2012
Modal wave-front reconstruction with Zernike polynomials and Karhunen–Loève functions Dai, Guang-ming Journal of the Optical Society of America A, Vol. 13, Issue 6 https://doi.org/10.1364/JOSAA.13.001218	journal	January 1996
Recurrence relations for the Cartesian derivatives of the Zernike polynomials Stephenson, Philip C. L. Journal of the Optical Society of America A, Vol. 31, Issue 4 https://doi.org/10.1364/JOSAA.31.000708	journal	January 2014
A generalized temporal phase unwrapping algorithm for three-dimensional profilometry Tian, Jindong; Peng, Xiang; Zhao, Xiaobo Optics and Lasers in Engineering, Vol. 46, Issue 4 https://doi.org/10.1016/j.optlaseng.2007.11.002	journal	April 2008
Phase invalidity identification framework with the temporal phase unwrapping method Huang, Lei; Asundi, Anand Krishna Measurement Science and Technology, Vol. 22, Issue 3 https://doi.org/10.1088/0957-0233/22/3/035304	journal	February 2011
Temporal phase unwrapping algorithms for fringe projection profilometry: A comparative review Zuo, Chao; Huang, Lei; Zhang, Minliang Optics and Lasers in Engineering, Vol. 85 https://doi.org/10.1016/j.optlaseng.2016.04.022	journal	October 2016

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Full-field 3D shape measurement of discontinuous specular objects by direct phase measuring deflectometry Liu, Yue; Huang, Shujun; Zhang, Zonghua Scientific Reports, Vol. 7, Issue 1 https://doi.org/10.1038/s41598-017-11014-5	journal	August 2017
Solution to the slope-height ambiguity problem in phase measuring deflectometry based on a co-axial telecentric optical path Yue, Hui-Min; Wu, Yu-Xiang; Song, Yi-Ping Measurement Science and Technology, Vol. 31, Issue 4 https://doi.org/10.1088/1361-6501/ab472f	journal	January 2020
Adaptive wavefront interferometry for unknown free-form surfaces Xue, Shuai; Chen, Shanyong; Fan, Zhanbin Optics Express, Vol. 26, Issue 17 https://doi.org/10.1364/oe.26.021910	journal	January 2018
Near-null interferometry using an aspheric null lens generating a broad range of variable spherical aberration for flexible test of aspheres Xue, Shuai; Chen, Shanyong; Tie, Guipeng Optics Express, Vol. 26, Issue 24 https://doi.org/10.1364/oe.26.031172	journal	January 2018
Self-calibration of in situ monoscopic deflectometric measurement in precision optical manufacturing Xu, Xueyang; Zhang, Xiangchao; Niu, Zhenqi Optics Express, Vol. 27, Issue 5 https://doi.org/10.1364/oe.27.007523	journal	January 2019
Extra-detection-free monoscopic deflectometry for the in situ measurement of freeform specular surfaces Xu, Xueyang; Zhang, Xiangchao; Niu, Zhenqi Optics Letters, Vol. 44, Issue 17 https://doi.org/10.1364/ol.44.004271	journal	January 2019
A Calibration Method for System Parameters in Direct Phase Measuring Deflectometry Deng, Xiaoting; Gao, Nan; Zhang, Zonghua Applied Sciences, Vol. 9, Issue 7 https://doi.org/10.3390/app9071444	journal	April 2019
Three-Dimensional Shape Measurements of Specular Objects Using Phase-Measuring Deflectometry Zhang, Zonghua; Wang, Yuemin; Huang, Shujun Sensors, Vol. 17, Issue 12 https://doi.org/10.3390/s17122835	journal	December 2017
Distance Calibration between Reference Plane and Screen in Direct Phase Measuring Deflectometry Huang, Shujun; Liu, Yue; Gao, Nan Sensors, Vol. 18, Issue 2 https://doi.org/10.3390/s18010144	journal	January 2018
Measurement of the Three-Dimensional Shape of Discontinuous Specular Objects Using Infrared Phase-Measuring Deflectometry Chang, Caixia; Zhang, Zonghua; Gao, Nan Sensors, Vol. 19, Issue 21 https://doi.org/10.3390/s19214621	journal	October 2019
An Accurate Calibration Means for the Phase Measuring Deflectometry System Han, Hao; Wu, Shiqian; Song, Zhan Sensors, Vol. 19, Issue 24 https://doi.org/10.3390/s19245377	journal	December 2019

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