Integrated Avalanche Photodiode arrays

Harmon, Eric S.

Integrated Avalanche Photodiode arrays

Patent · Tue Apr 18 04:00:00 UTC 2017

OSTI ID:1351819

Harmon, Eric S.

The present disclosure includes devices for detecting photons, including avalanche photon detectors, arrays of such detectors, and circuits including such arrays. In some aspects, the detectors and arrays include a virtual beveled edge mesa structure surrounded by resistive material damaged by ion implantation and having side wall profiles that taper inwardly towards the top of the mesa structures, or towards the direction from which the ion implantation occurred. Other aspects are directed to masking and multiple implantation and/or annealing steps. Furthermore, methods for fabricating and using such devices, circuits and arrays are disclosed.

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Research Organization:: LightSpin Technologies, Inc. Endicott, NY (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: SC0009538

Assignee:: LightSpin Technologies, Inc.

Patent Number(s):: 9,627,569

Application Number:: 14/718,352

OSTI ID:: 1351819

Country of Publication:: United States

Language:: English

References (22)

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