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Title: Sandia MEMS Visualization Tools v. 3.0

Abstract

This is a revision to the Sandia MEMS Visualization Tools. It replaces all previous versions. New features in this version: Support for AutoCAD 2014 and 2015 . This CD contains an integrated set of electronic files that: a) Provides a 2D Process Visualizer that generates cross-section images of devices constructed using the SUMMiT V fabrication process. b) Provides a 3D Visualizer that generates 3D images of devices constructed using the SUMMiT V fabrication process. c) Provides a MEMS 3D Model generator that creates 3D solid models of devices constructed using the SUMMiT V fabrication process. While there exists some files on the CD that are used in conjunction with software package AutoCAD , these files are not intended for use independent of the CD. Note that the customer must purchase his/her own copy of AutoCAD to use with these files.

Authors:
 [1];  [1];  [1]
  1. Sandia National Laboratories
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1331995
Report Number(s):
Sandia MEMS Visualization Tools; 005019IBMPC00
SCR #484.6
DOE Contract Number:
AC04-94AL85000
Resource Type:
Software
Software Revision:
00
Software Package Number:
005019
Software CPU:
IBMPC
Source Code Available:
No
Other Software Info:
Use of this software requires a license for ACIS, available from Spatial Technologies. www.spatial.com .
Country of Publication:
United States

Citation Formats

Yarberry, Victor, Jorgensen, Craig R., and Young, Andrew I.. Sandia MEMS Visualization Tools v. 3.0. Computer software. Vers. 00. USDOE. 23 Jun. 2016. Web.
Yarberry, Victor, Jorgensen, Craig R., & Young, Andrew I.. (2016, June 23). Sandia MEMS Visualization Tools v. 3.0 (Version 00) [Computer software].
Yarberry, Victor, Jorgensen, Craig R., and Young, Andrew I.. Sandia MEMS Visualization Tools v. 3.0. Computer software. Version 00. June 23, 2016.
@misc{osti_1331995,
title = {Sandia MEMS Visualization Tools v. 3.0, Version 00},
author = {Yarberry, Victor and Jorgensen, Craig R. and Young, Andrew I.},
abstractNote = {This is a revision to the Sandia MEMS Visualization Tools. It replaces all previous versions. New features in this version: Support for AutoCAD 2014 and 2015 . This CD contains an integrated set of electronic files that: a) Provides a 2D Process Visualizer that generates cross-section images of devices constructed using the SUMMiT V fabrication process. b) Provides a 3D Visualizer that generates 3D images of devices constructed using the SUMMiT V fabrication process. c) Provides a MEMS 3D Model generator that creates 3D solid models of devices constructed using the SUMMiT V fabrication process. While there exists some files on the CD that are used in conjunction with software package AutoCAD , these files are not intended for use independent of the CD. Note that the customer must purchase his/her own copy of AutoCAD to use with these files.},
doi = {},
year = 2016,
month = 6,
note =
}

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  • The SAMPLE (Sandia Agile MEMS Protyping, Layout tools, and Education) service makes Sandia`s state-of-the-art surface-micromachining fabrication process, known as SUMMiT, available to US industry for the first time. The service provides a short cause and customized computer-aided design (CAD) tools to assist customers in designing micromachine prototypes to be fabricated in SUMMiT. Frequent small-scale manufacturing runs then provide SAMPLE designers with hundreds of sophisticated MEMS (MicroElectroMechanical Systems) chips. SUMMiT (Sandia Ultra-planar, Multi-level MEMS Technology) offers unique surface-micromachining capabilities, including four levels of polycrystalline silicon (including the ground layer), flanged hubs, substrate contacts, one-micron design rules, and chemical-mechanical polishing (CMP) planarization.more » This paper describes the SUMMiT process, design tools, and other information relevant to the SAMPLE service and SUMMiT process.« less
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  • SUMMiT V (Sandia Ultra planar Multi level MEMS Technology) is a 5 level surface micromachine fabrication technology, which customers intornal and external to Sandia can access to fabricate prototype MEMS devices. This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c) Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at Sandia National Laboratories e) Facilitate the process of having post-fabrication services performed. While theremore » exist some files on the CD that are used in conjunction with software package AutoCAD, these files are not intended for use independent of the CD. Nole that the customer must purchase his/her own copy of Aut0CAD to use with these files.« less
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