Sandia MEMS Visualization Tools v. 3.0

Software · Thu Jun 23 00:00:00 EDT 2016

OSTI ID:1331995

Yarberry, Victor ^[1]; Jorgensen, Craig R. ^[1]; Young, Andrew I. ^[1]

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1. Sandia National Laboratories

This is a revision to the Sandia MEMS Visualization Tools. It replaces all previous versions. New features in this version: Support for AutoCAD 2014 and 2015 . This CD contains an integrated set of electronic files that: a) Provides a 2D Process Visualizer that generates cross-section images of devices constructed using the SUMMiT V fabrication process. b) Provides a 3D Visualizer that generates 3D images of devices constructed using the SUMMiT V fabrication process. c) Provides a MEMS 3D Model generator that creates 3D solid models of devices constructed using the SUMMiT V fabrication process. While there exists some files on the CD that are used in conjunction with software package AutoCAD , these files are not intended for use independent of the CD. Note that the customer must purchase his/her own copy of AutoCAD to use with these files.

• Short Name / Acronym: Sandia MEMS Visualization Tools; 005019IBMPC00
• Site Accession Number: SCR #484.6
• Version: 00
• Programming Language(s): Medium: X; OS: Windows 7 or 8.1
• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1331995
• Country of Origin: United States