Sandia Advanced MEMS Design Tools v. 3.0

Software · Thu Aug 25 04:00:00 EDT 2016

OSTI ID:1343553

Yarberry, Victor R. ^[1]; Allen, James J. ^[1]; Lantz, Jeffrey W. ^[1]; Priddy, Brian ^[2]; Westlin, Belinda ^[2]; Young, Andrew ^[1]

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1. Sandia National Laboratories
2. L&M Technologies

This is a major revision to the Sandia Advanced MEMS Design Tools. It replaces all previous versions. New features in this version: Revised to support AutoCAD 2014 and 2015 This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c) Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at Sandia National Laboratories e) Facilitate the process of having post-fabrication services performed. While there exists some files on the CD that are used in conjunction with software package AutoCAD, these files are not intended for use independent of the CD. Note that the customer must purchase his/her own copy of AutoCAD to use with these files.

• Short Name / Acronym: Sandia Advanced MEMS Design Tools; 005148MLTPL00
• Site Accession Number: SCR #392.6
• Version: 00
• Programming Language(s): Medium: X; OS: Windows 7 or 8.1
• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1343553
• Country of Origin: United States