Sandia Advanced MEMS Design Tools, V2.1

Software · Mon Feb 04 00:00:00 EST 2002

OSTI ID:1230665

Yarberry, Victor R; Allen, James J.; Barnes, Steve; Lantz, Jeff; Priddy, Brian; Reyes, David; Rodgers, M. Steven; Westling, Belinda

SUMMiT V (Sandia Ultra planar Multi level MEMS Technology) is a 5 level surface micromachine fabrication technology, which customers intornal and external to Sandia can access to fabricate prototype MEMS devices. This CD contains an integrated set of electronic files that: a) Describe the SUMMiT V fabrication process b) Provide enabling educational information (including pictures, videos, technical information) c) Facilitate the process of designing MEMS with the SUMMiT process (prototype file, Design Rule Checker, Standard Parts Library) d) Facilitate the process of having MEMS fabricated at Sandia National Laboratories e) Facilitate the process of having post-fabrication services performed. While there exist some files on the CD that are used in conjunction with software package AutoCAD, these files are not intended for use independent of the CD. Nole that the customer must purchase his/her own copy of Aut0CAD to use with these files.

• Short Name / Acronym: MEMSDesignTools2.1; 001659IBMPC00
• Version: 00
• Programming Language(s): Medium: X; OS: Windows NT or higher
• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: De-Ac04-94AL85000
• OSTI ID: 1230665
• Country of Origin: United States