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U.S. Department of Energy
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Fabrication and Trasnport in Counted Donor Devices using Top-Down Ion Implantation.

Conference ·
OSTI ID:1280773

Abstract not provided.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1280773
Report Number(s):
SAND2015-6229C; 598654
Resource Relation:
Conference: Proposed for presentation at the 2015 Si Qunatum Electronics Workshop held August 3-4, 2015 in Takamatsu, Japan.
Country of Publication:
United States
Language:
English