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Fabrictaion of Counted Donor Devices using Top-Down Ion Implantation.

Conference ·
OSTI ID:1371826
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Abstract not provided.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1371826
Report Number(s):
SAND2016-6626C; 644934
Country of Publication:
United States
Language:
English

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