SOI-Enabled MEMS Processes Lead to Novel Mechanical Optical and Atomic Physics Devices Presentation.

Conference · Wed Oct 01 04:00:00 EDT 2008

OSTI ID:1272546

Myers, David R.; Herrera, Gilbert V.; Bauer, Todd.; Blain, Matthew Glenn; Dodd, Paul E.; Dondero, Richard; Garcia, Ernest J.; Galambos, Paul C.; Hetherington, Dale L.; Hudgens, James J.; McCormick, Frederick B.; Nielson, Gregory N.; Nordquist, Christopher; Okandan, Murat; Ortiz, Keith; Platzbecker, Mark R.; Resnick, Paul J.; Shul, Randy John; Shaw, Michael; Sullivan, Charles T. ; Watts, Michael R.

Abstract not provided.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1272546
• Report Number(s): SAND2008-6783C; 533112
• Country of Publication: United States
• Language: English