Characterization of SOI MEMS Sidewall Roughness.
Conference
·
OSTI ID:1111708
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1111708
- Report Number(s):
- SAND2011-8515C; 456962
- Country of Publication:
- United States
- Language:
- English
Similar Records
CHARACTERIZATION OF SOI MEMS SIDEWALL ROUGHNESS.
Sidewall Roughness Effects on SOI MEMS Fracture Strength.
SIDEWALL ROUGHNESS EFFECTS ON SILICON-ON-INSULATOR (SOI) MEMS FRACTURE STRENGTH.
Conference
·
Thu Sep 01 00:00:00 EDT 2011
·
OSTI ID:1143500
Sidewall Roughness Effects on SOI MEMS Fracture Strength.
Conference
·
Sun Jun 01 00:00:00 EDT 2014
·
OSTI ID:1146894
SIDEWALL ROUGHNESS EFFECTS ON SILICON-ON-INSULATOR (SOI) MEMS FRACTURE STRENGTH.
Conference
·
Wed Oct 01 00:00:00 EDT 2014
·
OSTI ID:1315669