Dielectric Properties of BST/(Y2O3)x(ZrO2)1-x/BST Trilayer Films
Thin films of Ba1-xSrxTiO3 (BST) are being actively investigated for applications in dynamic random access memories (DRAM) because of their properties such as high dielectric constant, low leakage current, and high dielectric breakdown strength. Various approaches have been used to improve the dielectric properties of BST thin films such as doping, graded compositions, and multilayer structures. We have found that inserting a ZrO2 layer in between two BST layers results in a significant reduction in dielectric constant as well as dielectric loss. In this work the effect of Y2O3 doped ZrO2 on the dielectric properties of BST/ZrO2/BST trilayer structure is studied. The structure Ba0.8Sr0.2TiO3/(Y2O3)x(ZrO2)1-x/Ba0.8Sr0.2TiO3 is deposited by a sol-gel process on platinized Si substrate. The composition (x) of the middle layer is varied while keeping the total thickness of the trilayer film constant. The dielectric constant of the multilayer film decreases with the increase of Y2O3 amount in the film whereas there is a slight variation in dielectric loss. In Y2O3 doped multilayer thin films, the dielectric loss is lower in comparison to other films and also there is good frequency stability in the loss in the measured frequency range and hence very suitable for microwave device applications.
- Research Organization:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC36-08GO28308
- OSTI ID:
- 1258566
- Report Number(s):
- NREL/CP-5200-53362
- Journal Information:
- MRS Proceedings, Journal Name: MRS Proceedings Vol. 1292; ISSN 1946-4274; ISSN applab
- Publisher:
- Materials Research Society (MRS)
- Country of Publication:
- United States
- Language:
- English
Similar Records
Magnetron sputter-deposited multilayer (Ba{sub x}Sr{sub 1x})Ti{sub 1+y}O{sub 3+z} thin films for passive and active devices.
La doped Ba{sub 1{minus}x}Sr{sub x}TiO{sub 3} thin films for tunable device applications