ZrO2 Layer Thickness Dependent Electrical and Dielectric Properties of BST/ZrO2/BST Multilayer Thin Films

Conference · Sat Jan 01 00:00:00 EST 2011

DOI:https://doi.org/10.1557/opl.2011.891· OSTI ID:1049608

Sahoo, Santosh K.; Misra, D.; Agrawal, D. C.; Mohapatra, Y. N.

Recently, high K materials play an important role in microelectronic devices such as capacitors, memory devices, and microwave devices. Now a days ferroelectric barium strontium titanate [Ba{sub x}Sr{sub 1-x}TiO{sub 3}, (BST)] thin film is being actively investigated for applications in dynamic random access memories (DRAM), field effect transistor (FET), and tunable devices because of its properties such as high dielectric constant, low leakage current, low dielectric loss, and high dielectric breakdown strength. Several approaches have been used to optimize the dielectric and electrical properties of BST thin films such as doping, graded compositions, and multilayer structures. We have found that inserting a ZrO{sub 2} layer in between two BST layers results in a significant reduction in dielectric constant, loss tangent, and leakage current in the multilayer thin films. Also it is shown that the properties of multilayer structure are found to depend strongly on the sublayer thicknesses. In this work the effect of ZrO{sub 2} layer thickness on the dielectric, ferroelectric as well as electrical properties of BST/ZrO{sub 2}/BST multilayer structure is studied. The multilayer Ba{sub 0.8}Sr{sub 0.2}TiO{sub 3}/ZrO{sub 2}/Ba{sub 0.8}Sr{sub 0.2}TiO{sub 3} film is deposited by a sol-gel process on the platinized Si substrate. The thickness of the middle ZrO{sub 2} layer is varied while keeping the top and bottom BST layer thickness as fixed. It is observed that the dielectric constant, dielectric loss tangent, and leakage current of the multilayer films reduce with the increase of ZrO{sub 2} layer thickness and hence suitable for memory device applications. The ferroelectric properties of the multilayer film also decrease with the ZrO{sub 2} layer thickness.

• Research Organization: National Renewable Energy Lab. (NREL), Golden, CO (United States)
• Sponsoring Organization: USDOE Office of Energy Efficiency and Renewable Energy (EERE), Renewable Power Office. Solar Energy Technologies Office
• DOE Contract Number: AC36-08GO28308
• OSTI ID: 1049608
• Report Number(s): NREL/CP-5200-55513; TRN: US201218%%86
• Resource Relation: Conference: Presented at the Materials Research Society Symposium, 25-29 April 2011, San Francisco, California; Related Information: Paper No.MRSS11-1368-WW08-13
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
36 MATERIALS SCIENCE
BARIUM
BREAKDOWN
CAPACITORS
DIELECTRIC MATERIALS
DIELECTRIC PROPERTIES
ELECTRICAL PROPERTIES
FIELD EFFECT TRANSISTORS
FUNCTIONALS
LEAKAGE CURRENT
MEMORY DEVICES
MICROELECTRONICS
PERMITTIVITY
SOL-GEL PROCESS
STRONTIUM TITANATES
THICKNESS
THIN FILMS
solar energy
dynamic random access memories (DRAM)
multilayer thin films