Thermal Conductivity Comparison of Indium Gallium Zinc Oxide Thin Films: Dependence on Temperature, Crystallinity, and Porosity

Cui, Boya; Zeng, Li; Keane, Denis; Bedzyk, Michael J.; Buchholz, D. Bruce; Chang, Robert P. H.; Yu, Xinge; Smith, Jeremy; Marks, Tobin J.; Xia, Yu; Facchetti, Antonio F.; Medvedeva, Julia E.; Grayson, M.

doi:10.1021/acs.jpcc.5b12105

Thermal Conductivity Comparison of Indium Gallium Zinc Oxide Thin Films: Dependence on Temperature, Crystallinity, and Porosity

Journal Article · Wed Mar 09 00:00:00 EST 2016 · Journal of Physical Chemistry. C

DOI:https://doi.org/10.1021/acs.jpcc.5b12105· OSTI ID:1249245

Cui, Boya ^[1]; Zeng, Li ^[1]; Keane, Denis ^[2]; Bedzyk, Michael J. ^[1]; Buchholz, D. Bruce ^[1]; Chang, Robert P. H. ^[1]; Yu, Xinge ^[1]; Smith, Jeremy ^[1]; Marks, Tobin J. ^[1]; Xia, Yu ^[3]; Facchetti, Antonio F. ^[4]; Medvedeva, Julia E. ^[5]; Grayson, M. ^[1]

Northwestern Univ., Evanston, IL (United States)
Northwestern Univ., Evanston, IL (United States); Northwestern Synchrotron Research Center, Argonne, IL (United States)
Polyera Corporation, Skokie, IL (United States)
Northwestern Univ., Evanston, IL (United States); Polyera Corporation, Skokie, IL (United States)
Missouri Univ. of Science and Technology, Rolla, MO (United States)

Here, the cross-plane thermal conductivity of InGaZnO (IGZO) thin films was measured using the 3ω technique from 18 to 300 K. The studied morphologies include amorphous (a-IGZO), semicrystalline (semi-c-IGZO), and c-axis-aligned single-crystal-like IGZO (c-IGZO) grown by pulsed laser deposition (PLD) as well as a-IGZO deposited by sputtering and by solution combustion processing. The atomic structures of the amorphous and crystalline films were simulated with ab initio molecular dynamics. The film quality and texturing information was assessed by X-ray diffraction and grazing incidence wide-angle X-ray scattering. X-ray reflectivity was also conducted to quantify film densities and porosities. All the high-density films exhibit an empirical power-law temperature dependence of the thermal conductivity $$κ \sim T^{0.6}$$ in the specified temperature range. Among the PLD dense films, semi-c-IGZO exhibits the highest thermal conductivity, remarkably exceeding both films with more order (c-IGZO) and with less order (a-IGZO) by a factor of 4. The less dense combustion-synthesized films, on the other hand, exhibited lower thermal conductivity, quantitatively consistent with a porous film using either an effective medium or percolation model. All samples are consistent with the porosity-adapted Cahill–Pohl (p-CP) model of minimum thermal conductivity.

View Accepted Manuscript (DOE)

Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

Sponsoring Organization:: International Institute for Nanotechnology (IIN); National Science Foundation (NSF); State of Illinois

OSTI ID:: 1249245

Journal Information:: Journal of Physical Chemistry. C, Journal Name: Journal of Physical Chemistry. C Journal Issue: 14 Vol. 120; ISSN 1932-7447

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: ENGLISH

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