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Magnetorheological finishing of chemical-vapor deposited zinc sulfide via chemically and mechanically modified fluids

Journal Article · · Applied Optics
DOI:https://doi.org/10.1364/AO.55.001481· OSTI ID:1242977
 [1];  [2];  [2];  [2];  [2]
  1. Univ. of Rochester, Rochester, NY (United States); Laboratory for Laser Energetics, University of Rochester, Rochester, NY
  2. Univ. of Rochester, Rochester, NY (United States)

In this study, we describe the anisotropy in the material removal rate (MRR) of the polycrystalline, chemical-vapor deposited zinc sulfide (ZnS).We define the polycrystalline anisotropy via microhardness and chemical erosion tests for four crystallographic orientations of ZnS: (100), (110), (111), and (311). Anisotropy in the MRR was studied under magnetorheological finishing (MRF) conditions. Three chemically and mechanically modified magnetorheological (MR) fluids at pH values of 4, 5, and 6 were used to test the MRR variations among the four single-crystal planes. When polishing the single-crystal planes and the polycrystalline with pH 5 and pH 6MR fluids, variations were found in the MRR among the four single-crystal planes and surface artifacts were observed on the polycrystalline material. When polishing the single-crystal planes and the polycrystalline with the modified MR fluid at pH 4, however, minimal variation was observed in the MRR among the four orientations and a reduction in surface artifacts was achieved on the polycrystalline material.

Research Organization:
Univ. of Rochester, Rochester, NY (United States)
Sponsoring Organization:
USDOE
Grant/Contract Number:
NA0001944
OSTI ID:
1242977
Alternate ID(s):
OSTI ID: 1238407
Journal Information:
Applied Optics, Journal Name: Applied Optics Journal Issue: 6 Vol. 55; ISSN 0003-6935; ISSN APOPAI
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English

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Cited By (2)

Ultra-precision fabrication of a nickel-phosphorus layer on aluminum substrate by SPDT and MRF journal January 2018
Experimental study on chemical mechanical polishing of chalcogenide glasses journal January 2019

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