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Title: Magnetorheological finishing of chemical-vapor deposited zinc sulfide via chemically and mechanically modified fluids

Journal Article · · Applied Optics
DOI:https://doi.org/10.1364/AO.55.001481· OSTI ID:1242977

In this study, we describe the anisotropy in the material removal rate (MRR) of the polycrystalline, chemical-vapor deposited zinc sulfide (ZnS).We define the polycrystalline anisotropy via microhardness and chemical erosion tests for four crystallographic orientations of ZnS: (100), (110), (111), and (311). Anisotropy in the MRR was studied under magnetorheological finishing (MRF) conditions. Three chemically and mechanically modified magnetorheological (MR) fluids at pH values of 4, 5, and 6 were used to test the MRR variations among the four single-crystal planes. When polishing the single-crystal planes and the polycrystalline with pH 5 and pH 6MR fluids, variations were found in the MRR among the four single-crystal planes and surface artifacts were observed on the polycrystalline material. When polishing the single-crystal planes and the polycrystalline with the modified MR fluid at pH 4, however, minimal variation was observed in the MRR among the four orientations and a reduction in surface artifacts was achieved on the polycrystalline material.

Research Organization:
Univ. of Rochester, NY (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
NA0001944
OSTI ID:
1242977
Alternate ID(s):
OSTI ID: 1238407
Journal Information:
Applied Optics, Vol. 55, Issue 6; ISSN 0003-6935
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 6 works
Citation information provided by
Web of Science

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Cited By (2)

Ultra-precision fabrication of a nickel-phosphorus layer on aluminum substrate by SPDT and MRF journal January 2018
Experimental study on chemical mechanical polishing of chalcogenide glasses journal January 2019