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Efficiency of a multilayer-Laue-lens with a 102 μm aperture

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4929505· OSTI ID:1239773
 [1];  [2];  [3];  [4];  [4];  [1];  [1]
  1. Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source
  2. Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source; Fraunhofer IWS Dresden (Germany)
  3. Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source; Brookhaven National Lab. (BNL), Upton, NY (United States)
  4. Brookhaven National Lab. (BNL), Upton, NY (United States)
A multilayer-Laue-lens (MLL) comprised of WSi2/Al layers stacked to a full thickness of 102 microns was characterized for its diffraction efficiency and dynamical diffraction properties by x-ray measurements made in the far field. The achieved aperture roughly doubles the previous maximum reported aperture for an MLL, thereby doubling the working distance. Negative and positive first orders were found to have 14.2 % and 13.0 % efficiencies, respectively. A section thickness of 9.6 μm was determined from Laue-case thickness fringes in the diffraction data. A background gas consisting of 90 % Ar and 10 % N2 was used for sputtering. This material system was chosen to reduce grown-in stress as the multilayer is deposited. Although some regions of the full MLL exhibited defects, the presently reported results were obtained for a region devoid of defects. The data compare well to dynamical diffraction calculations with Coupled Wave Theory (CWT) which provided confirmation of the optical constants and densities assumed for the CWT calculations.
Research Organization:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
OSTI ID:
1239773
Alternate ID(s):
OSTI ID: 1229639
OSTI ID: 22489150
OSTI ID: 1392419
Report Number(s):
BNL--108332-2015-JA
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 8 Vol. 107; ISSN APPLAB; ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

References (20)

X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 journal July 1993
Coupled wave description of the diffraction by zone plates with high aspect ratios journal May 1992
Metrology of multilayer Laue lens structures by means of scanning electron microscope imaging
  • Jahedi, N.; Conley, R.; Shi, B.
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.11.015
journal May 2010
Fabrication of customizable wedged multilayer Laue lenses by adding a stress layer journal November 2014
NIH Image to ImageJ: 25 years of image analysis journal June 2012
Performance of a double-multilayer monochromator at Beamline 2-BM at the Advanced Photon Source journal March 2002
High-efficiency diffractive x-ray optics from sectioned multilayers journal April 2005
Sectioning of multilayers to make a multilayer Laue lens journal January 2007
Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens journal June 2008
Wedged multilayer Laue lens journal May 2008
Development of Multilayer Laue Lenses; (1) Linear Type conference January 2011
Hard x-ray nanofocusing by multilayer Laue lenses journal June 2014
Nanometer Linear Focusing of Hard X Rays by a Multilayer Laue Lens journal March 2006
Performance of single-photon-counting PILATUS detector modules journal April 2009
Ptychography with multilayer Laue lenses journal August 2014
Multilayer Laue lenses as high-resolution x-ray optics
  • Maser, Joerg; Stephenson, Gregory B.; Vogt, Stefan
  • Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings https://doi.org/10.1117/12.560046
conference November 2004
Multilayer growth in the APS rotary deposition system conference September 2007
Optical Properties of MoSi 2 /Si Multilayer Laue Lens as Nanometer X-ray Focusing Device journal October 2008
Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses journal January 2011
Achieving hard X-ray nanofocusing using a wedged multilayer Laue lens journal January 2015

Cited By (4)

Interlaced zone plate optics for hard X-ray imaging in the 10 nm range journal March 2017
Multilayer Laue Lens: A Brief History and Current Status journal July 2016
Point focusing with flat and wedged crossed multilayer Laue lenses journal February 2017
Achieving diffraction-limited nanometer-scale X-ray point focus with two crossed multilayer Laue lenses: alignment challenges journal January 2017

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