Microsystem technology development at Sandia National Laboratories
Conference
·
OSTI ID:123234
An overview of the major sensor and actuator projects using the micromachining capabilities of the Microelectronics Development Laboratory at Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has also been developed for integrating microelectronics with surface micromachined micromechanical devices.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 123234
- Report Number(s):
- SAND--95-2326C; CONF-9510229--1; ON: DE96001940
- Country of Publication:
- United States
- Language:
- English
Similar Records
Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory
Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory
Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory
Conference
·
Wed Jan 31 23:00:00 EST 1996
·
OSTI ID:206434
Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory
Conference
·
Thu Oct 31 23:00:00 EST 1996
·
OSTI ID:399963
Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory
Conference
·
Tue Aug 01 00:00:00 EDT 1995
·
OSTI ID:100183