Microsystem technology development at Sandia National Laboratories
Conference
·
OSTI ID:123234
An overview of the major sensor and actuator projects using the micromachining capabilities of the Microelectronics Development Laboratory at Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has also been developed for integrating microelectronics with surface micromachined micromechanical devices.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 123234
- Report Number(s):
- SAND-95-2326C; CONF-9510229-1; ON: DE96001940; TRN: 95:008021
- Resource Relation:
- Conference: Microsystem technologies in the USA and Canada, Duesseldorf (Germany), 30 Oct - 4 Nov 1995; Other Information: PBD: 1995
- Country of Publication:
- United States
- Language:
- English
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