Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory
Conference
·
OSTI ID:206434
An overview of surface micromachining projects at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has also been developed for integrating microelectronics with surface micromachined micromechanical devices.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 206434
- Report Number(s):
- SAND--96-0099C; CONF-9603121--1; CONF-9604112--1; ON: DE96007672
- Country of Publication:
- United States
- Language:
- English
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