High-accuracy Aspheric X-ray Mirror Metrology Using Software Configurable Optical Test System/deflectometry
Journal Article
·
· Optical Engineering
- Univ. of Arizona, Tucson, AZ (United States)
- Brookhaven National Lab. (BNL), Upton, NY (United States)
The Software Configurable Optical Test System (SCOTS) uses deflectometry to measure surface slopes of general optical shapes without the need for additional null optics. Careful alignment of test geometry and calibration of inherent system error improve the accuracy of SCOTS to a level where it competes with interferometry. We report a SCOTS surface measurement of an off-axis superpolished elliptical x-ray mirror that achieves <1 nm<1 nm root-mean-square accuracy for the surface measurement with low-order term included.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- SC00112704
- OSTI ID:
- 1229107
- Report Number(s):
- BNL-111182-2015-JA
- Journal Information:
- Optical Engineering, Vol. 54, Issue 8; ISSN 0091-3286
- Publisher:
- SPIE
- Country of Publication:
- United States
- Language:
- English
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