Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics

Munechika, Keiko; Chao, Weilun; Dhuey, Scott; Lacey, Ian; Pina-Hernandez, Carlos; Rochester, Simon; Yashchuk, Valeriy V

doi:10.1117/12.2633163

Title: Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics

Conference · Mon Oct 03 00:00:00 EDT 2022

DOI:https://doi.org/10.1117/12.2633163· OSTI ID:1994326

Munechika, Keiko; Chao, Weilun; Dhuey, Scott; Lacey, Ian; Pina-Hernandez, Carlos; Rochester, Simon; Yashchuk, Valeriy V

High-accuracy surface metrology is vitally important in manufacturing ultra-high-quality free-form mirrors designed to manipulate x-ray light with nanometer-scale wavelengths. The current and potential capabilities of x˗ray mirror manufacturing are limited by inherent imperfections of the integrated metrology tools. Metrology tools are currently calibrated with super-polished flat test-standard/reference mirrors. This is acceptable for fabrication of slightly curved x-ray optics. However, for even moderately curved aspherical x-ray mirrors the flat-reference calibration is not sufficiently accurate. For micro-stitching interferometry developed for surface measurements with curved x-ray mirrors, the tool aberration errors are known to be transferred into the optical surface topography of x-ray mirrors. Our approach to improving metrology is to thoroughly calibrate the measuring tool and apply the results of the calibration to deconvolution of the measured data. Here we explore the application of a recently developed technique for calibrating the instrument transfer function (ITF) of 3D optical surface profilers to metrology with significantly curved x-ray optics. The technique, based on test standards patterned with two-dimensional (2D) binary pseudo-random arrays (BPRAs), employs the unique properties of the BPRA patterns in the spatial frequency domain. The inherent 2D power spectral density of the pattern has a deterministic white-noise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range and field of view of an instrument. The high efficacy of the technique has been previously demonstrated in application to metrology with flat and slightly curved optics. Here, we concentrate on development of an efficient fabrication process for production of highly randomized (HR) BPRA test standards on flat and 500-mm spherical optical substrates. We also compare and discuss the results of the ITF calibration of an interferometric microscope when using the HR BPRA standards on flat and curved substrates.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22), Materials Sciences & Engineering Division (SC-22.2)

DOE Contract Number:: AC02-05CH11231

OSTI ID:: 1994326

Resource Relation:: Conference: SPIE Optical Engineering + Applications, San Diego, CA (United States), 2022

Country of Publication:: United States

Language:: English

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