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U.S. Department of Energy
Office of Scientific and Technical Information
 

Binary pseudo-random array (BPRA) for inspection and calibration for cylindrical wavefront interferometry

Conference ·
DOI:https://doi.org/10.1117/12.2677966· OSTI ID:2336566
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High-accuracy metrology is vitally important in manufacturing ultra-high-quality free-form mirrors designed to manipulate X-ray light with nanometer-scale wavelengths. However, surface topography measurements are instrument dependent, and without the knowledge of how the instrument performs under the practical usage conditions, the measured data contain some degree of uncertainty. Binary Pseudo Random Array (BPRA) “white noise” artifact are effective and useful for characterizing the Instrument Transfer Function (ITF) of surface topography metrology tools and wavefront measurement instrument. BPRA artifact contains features with all spatial frequencies in the instrument bandpass with equal weight. As a result, power spectral density of the patterns has a deterministic white-noise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range. The application examples include electron microscopes, x-ray microscopes, interferometric microscopes, and large field-of-view Fizeau Interferometers. Furthermore, we will introduce the application of BPRA method to characterizing the ITF of Cylindrical Wavefront Interferometry (CWI), by developing the BPRA artifact which matches the radius of curvature of the cylindrical wavefront. The data acquisition and analysis procedures for different applications of the ITF calibration technique developed are also discussed.

Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
DOE Contract Number:
AC02-05CH11231
OSTI ID:
2336566
Country of Publication:
United States
Language:
English

References (28)

Reliability investigation of the instrument transfer function calibration technique based on binary pseudo-random array standards conference October 2022
Advanced environmental control as a key component in the development of ultrahigh accuracy ex situ metrology for x-ray optics journal October 2015
High performance Fizeau and scanning white-light interferometers for mid-spatial frequency optical testing of free-form optics conference August 2005
Dual-CGH interferometry test for x-ray mirror mandrels conference June 2009
Accuracy of phase shifting interferometry journal December 1988
The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors conference November 2018
Binary pseudo-random array test standard optimized for characterization of interferometric microscopes conference August 2021
Binary pseudorandom grating standard for calibration of surface profilometers journal July 2008
Microstitching interferometry for x-ray reflective optics journal May 2003
Design and fabrication of refractive nulls for testing the segmented mirrors of the Constellation-X spectroscopy x-ray telescope (SXT) conference August 2005
Binary pseudorandom array test standard optimized for characterization of large field-of-view optical interferometers conference August 2020
Retrace error: interferometry's dark little secret conference October 2013
Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes journal May 2010
On tilt and curvature dependent errors and the calibration of coherence scanning interferometry journal February 2017
Characterization and operation optimization of large aperture optical interferometers using binary pseudorandom array test standards conference August 2018
On the scientific impact of the uncertainties in the Athena mirror effective area journal October 2022
Analytical expressions of the surface shape of ‘diaboloid’ mirrors conference August 2020
The Constellation-X Spectroscopy X-ray Telescope conference October 2004
Super-resolution surface slope metrology of x-ray mirrors journal July 2020
Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics
  • Kanaoka, M.; Liu, C.; Nomura, K.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, Vol. 25, Issue 6 https://doi.org/10.1116/1.2789440
journal November 2007
Refractive null correctors for aspheric surfaces journal December 1976
Optics for coherent X-ray applications journal August 2014
Propagation errors in precision Fizeau interferometry journal December 1993
Investigation on lateral resolution of surface slope profilers conference September 2019
Binary pseudo-random gratings and arrays for calibration of modulation transfer functions of surface profilometers
  • Barber, Samuel K.; Anderson, Erik D.; Cambie, Rossana
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.11.046
journal May 2010
Optical metrology for the segmented optics on the Constellation-X spectroscopy x-ray telescope conference October 2004
Computer-generated hologram cavity interferometry test for large x-ray mirror mandrels: design journal June 2009
Calibration of the modulation transfer function of surface profilometers with binary pseudorandom test standards: expanding the application range to Fizeau interferometers and electron microscopes journal September 2011

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