Capacitive microelectromechanical switches with dynamic soft-landing

Jain, Ankit; Alam, Muhammad Ashraful; Nair, Pradeep R.

Capacitive microelectromechanical switches with dynamic soft-landing

Patent · Tue Oct 13 04:00:00 EDT 2015

OSTI ID:1223097

Jain, Ankit; Alam, Muhammad Ashraful; Nair, Pradeep R.

A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.

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Research Organization:: Purdue Research Foundation, West Lafayette, IN (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FC52-08NA28617

Assignee:: Purdue Research Foundation (West Lafayette, IN)

Patent Number(s):: 9,160,333

Application Number:: 13/466,006

OSTI ID:: 1223097

Country of Publication:: United States

Language:: English

References (21)

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