skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Electrostatic MEMS devices with high reliability

Abstract

The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

Inventors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Univ. of Wisconsin, Madison, WI (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1170735
Patent Number(s):
8,963,659
Application Number:
13/114,945
Assignee:
Goldsmith,Charles L. (Plano, TX) CHO
DOE Contract Number:  
FG02-02ER46016
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 May 24
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Goldsmith, Charles L, Auciello, Orlando H, Sumant, Anirudha V, Mancini, Derrick C, Gudeman, Chris, Sampath, Suresh, Carlilse, John A, Carpick, Robert W, and Hwang, James. Electrostatic MEMS devices with high reliability. United States: N. p., 2015. Web.
Goldsmith, Charles L, Auciello, Orlando H, Sumant, Anirudha V, Mancini, Derrick C, Gudeman, Chris, Sampath, Suresh, Carlilse, John A, Carpick, Robert W, & Hwang, James. Electrostatic MEMS devices with high reliability. United States.
Goldsmith, Charles L, Auciello, Orlando H, Sumant, Anirudha V, Mancini, Derrick C, Gudeman, Chris, Sampath, Suresh, Carlilse, John A, Carpick, Robert W, and Hwang, James. Tue . "Electrostatic MEMS devices with high reliability". United States. https://www.osti.gov/servlets/purl/1170735.
@article{osti_1170735,
title = {Electrostatic MEMS devices with high reliability},
author = {Goldsmith, Charles L and Auciello, Orlando H and Sumant, Anirudha V and Mancini, Derrick C and Gudeman, Chris and Sampath, Suresh and Carlilse, John A and Carpick, Robert W and Hwang, James},
abstractNote = {The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {2}
}

Patent:

Save / Share: