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Electrical latching of microelectromechanical devices

Patent ·
OSTI ID:1175117
;
Methods are disclosed for row and column addressing of an array of microelectromechanical (MEM) devices. The methods of the present invention are applicable to MEM micromirrors or memory elements and allow the MEM array to be programmed and maintained latched in a programmed state with a voltage that is generally lower than the voltage required for electrostatically switching the MEM devices.
Research Organization:
Sandia National Laboratories (SNL-CA), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation
Patent Number(s):
6,813,060
Application Number:
10/316,172
OSTI ID:
1175117
Country of Publication:
United States
Language:
English

References (1)

Silicon micromirrors and their prospective application in the Next-Generation Space Telescope
  • Garcia, Ernest J.; Polosky, Marc A.; Sleefe, Gerard E.
  • International Symposium on Optical Science and Technology, SPIE Proceedings https://doi.org/10.1117/12.453829
conference November 2002

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