Electrostatic MEMS devices with high reliability

Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

Title: Electrostatic MEMS devices with high reliability

Patent · Tue Feb 24 00:00:00 EST 2015

OSTI ID:1170735

Goldsmith, Charles L; Auciello, Orlando H; Sumant, Anirudha V; Mancini, Derrick C; Gudeman, Chris; Sampath, Suresh; Carlilse, John A; Carpick, Robert W; Hwang, James

The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.

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Research Organization:: Univ. of Wisconsin, Madison, WI (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-02ER46016

Assignee:: Goldsmith,Charles L. (Plano, TX)

Patent Number(s):: 8,963,659

Application Number:: 13/114,945

OSTI ID:: 1170735

Resource Relation:: Patent File Date: 2011 May 24

Country of Publication:: United States

Language:: English

References (13)

Microminiature, monolithic, variable electrical signal processor and apparatus including same Kanack, Brad https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5526172 US Patent Document 5,526,172	patent	June 1996
Micromechanical microwave switching Goldsmith, Charles L.; Kanack, Bradley M.; Lin, Tsen-Hwang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5619061 US Patent Document 5,619,061	patent	April 1997
Method and apparatus for switching high frequency signals Ehmke, John Charles; Goldsmith, Charles L.; Yao, Zhimin Jamie https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6391675 US Patent Document 6,391,675	patent	May 2002
Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor Krauss, Alan R.; Gruen, Dieter M.; Pellin, Michael J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6422077 US Patent Document 6,422,077	patent	July 2002
Proximity micro-electro-mechanical system Goldsmith, Charles L. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6608268 US Patent Document 6,608,268	patent	August 2003
Method and apparatus for switching high frequency signals Ehmke, John Charles; Goldsmith, Charles L.; Yao, Zhimin Jamie https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6700172 US Patent Document 6,700,172	patent	March 2004
Capacitive type microelectromechanical RF switch Chen, Li-Shu; Fudem, Howard; Crockett, III, Donald E. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6777765 US Patent Document 6,777,765	patent	August 2004
Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices Gruen, Dieter M.; Busmann, Hans-Gerd; Meyer, Eva-Maria https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6811612 US Patent Document 6,811,612	patent	November 2004
Micromechanical membrane switches for microwave applications Goldsmith, C.; Powers, B. Proceedings of 1995 IEEE MTT-S International Microwave Symposium https://doi.org/10.1109/MWSYM.1995.406090	conference	January 1995
Characteristics of micromachined switches at microwave frequencies Goldsmith, C.; Randall, J.; Eshelman, S. 1996 IEEE MTT-S International Microwave Symposium Digest https://doi.org/10.1109/MWSYM.1996.511231	conference	January 1996
Performance of low-loss RF MEMS capacitive switches Goldsmith, C. L.; Eshelman, S. IEEE Microwave and Guided Wave Letters, Vol. 8, Issue 8 https://doi.org/10.1109/75.704410	journal	January 1998
Temperature Acceleration of Dielectric Charging in RF MEMS Capacitive Switches Yuan, Xiaobin; Peng, Zhen; M. Hwang, James 2006 IEEE MTT-S International Microwave Symposium Digest https://doi.org/10.1109/MWSYM.2006.249923	conference	June 2006
Acceleration of Dielectric Charging in RF MEMS Capacitive Switches Yuan, Xiaobin; Peng, Zhen; Hwang, James C. M. IEEE Transactions on Device and Materials Reliability, Vol. 6, Issue 4 https://doi.org/10.1109/TDMR.2006.887417	journal	January 2006

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