Maskless laser writing of microscopic metallic interconnects
Patent
·
OSTI ID:119056
A method of forming a metal pattern on a substrate is disclosed. The method includes depositing an insulative nitride film on a substrate and irradiating a laser beam onto the nitride film, thus decomposing the metal nitride into a metal constituent and a gaseous constituent, the metal constituent remaining in the nitride film as a conductive pattern. 4 figs.
- Research Organization:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-84OR21400
- Assignee:
- Marietta Energy Systems, Inc., Oak Ridge, TN (United States)
- Patent Number(s):
- US 5,459,098/A/
- Application Number:
- PAN: 7-962,811
- OSTI ID:
- 119056
- Resource Relation:
- Other Information: PBD: 17 Oct 1995
- Country of Publication:
- United States
- Language:
- English
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