Maskless laser writing of microscopic metallic interconnects
Patent
·
OSTI ID:870119
- Oak Ridge, TN
A method of forming a metal pattern on a substrate. The method includes depositing an insulative nitride film on a substrate and irradiating a laser beam onto the nitride film, thus decomposing the metal nitride into a metal constituent and a gaseous constituent, the metal constituent remaining in the nitride film as a conductive pattern.
- Research Organization:
- LOCKHEED MARTIN ENRGY SYST INC
- DOE Contract Number:
- AC05-84OR21400
- Assignee:
- Marietta Energy Systems, Inc. (Oak Ridge, TN)
- Patent Number(s):
- US 5459098
- OSTI ID:
- 870119
- Country of Publication:
- United States
- Language:
- English
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