Taxel-addressable matrix of vertical nanowire piezotronic transistors

Patent · Tue May 05 04:00:00 EDT 2015

OSTI ID:1179018

Wang, Zhong Lin; Wu, Wenzhuo; Wen, Xiaonan

A tactile sensing matrix includes a substrate, a first plurality of elongated electrode structures, a plurality of vertically aligned piezoelectric members, an insulating layer infused into the piezoelectric members and a second plurality of elongated electrode structures. The first plurality of elongated electrode structures is disposed on the substrate along a first orientation. The vertically aligned piezoelectric members is disposed on the first plurality of elongated electrode structures and form a matrix having columns of piezoelectric members disposed along the first orientation and rows of piezoelectric members disposed along a second orientation that is transverse to the first orientation. The second plurality of elongated electrode structures is disposed on the insulating layer along the second orientation. The elongated electrode structures form a Schottky contact with the piezoelectric members. When pressure is applied to the piezoelectric members, current flow therethrough is modulated.

• Research Organization: Georgia Tech Research Corporation, Atlanta, GA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: FG02-07ER46394
• Assignee: Georgia Tech Research Corporation (Atlanta, GA)
• Patent Number(s): 9,024,395
• Application Number: 14/019,691
• OSTI ID: 1179018
• Country of Publication: United States
• Language: English

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