Large-scale fabrication of vertically aligned ZnO nanowire arrays

Patent · Tue Sep 09 04:00:00 EDT 2014

OSTI ID:1157074

Wang, Zhong Lin; Hu, Youfan; Zhang, Yan; Xu, Chen; Zhu, Guang

A generator includes a substrate, a first electrode layer, a dense plurality of vertically-aligned piezoelectric elongated nanostructures, an insulating layer and a second electrode layer. The substrate has a top surface and the first electrode layer is disposed on the top surface of the substrate. The dense plurality of vertically-aligned piezoelectric elongated nanostructures extends from the first electrode layer. Each of the nanostructures has a top end. The insulating layer is disposed on the top ends of the nanostructures. The second electrode layer is disposed on the non-conductive layer and is spaced apart from the nanostructures.

• Research Organization: Georgia Tech Research Corporation, Atlanta, GA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: FG02-07ER46394
• Assignee: Georgia Tech Research Corporation (Atlanta, GA)
• Patent Number(s): 8,829,767
• Application Number: 13/473,867
• OSTI ID: 1157074
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY