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Large-scale lateral nanowire arrays nanogenerators

Patent ·
OSTI ID:1117632
In a method of making a generating device, a plurality of spaced apart elongated seen members are deposited onto a surface of a flexible non-conductive substrate. An elongated conductive layer is applied to a top surface and a first side of each seed member, thereby leaving an exposed second side opposite the first side. A plurality of elongated piezoelectric nanostructures is grown laterally from the second side of each seed layer. A second conductive material is deposited onto the substrate adjacent each elongated first conductive layer so as to be soupled the distal end of each of the plurality of elongated piezoelectric nanostructures. The second conductive material is selected so as to form a Schottky barrier between the second conductive material and the distal end of each of the plurality of elongated piezoelectric nanostructures and so as to form an electrical contact with the first conductive layer.
Research Organization:
Georgia Tech Research Corporation, Atlanta, GA, USA
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-07ER46394
Assignee:
Georgia Tech Research Corporation (Atlanta, GA)
Patent Number(s):
8,623,451
Application Number:
12/943,499
OSTI ID:
1117632
Country of Publication:
United States
Language:
English

References (11)

Position-Controlled Seedless Growth of ZnO Nanorod Arrays on a Polymer Substrate via Wet Chemical Synthesis journal July 2007
Layer-by-Layer Assembly of Nanowires for Three-Dimensional, Multifunctional Electronics journal March 2007
Growth of Horizonatal ZnO Nanowire Arrays on Any Substrate journal November 2008
Nanoarchitectures of semiconducting and piezoelectric zinc oxide journal February 2005
MEMS power generator with transverse mode thin film PZT journal July 2005
Integrated Multilayer Nanogenerator Fabricated Using Paired Nanotip-to-Nanowire Brushes journal November 2008
Large-Size Liftable Inverted-Nanobowl Sheets as Reusable Masks for Nanolithiography journal September 2005
Ultraviolet photodetectors based on selectively grown ZnO nanorod arrays journal May 2009
Formation of double-side teethed nanocombs of ZnO and self-catalysis of Zn-terminated polar surface journal January 2006
Nanowire Piezoelectric Nanogenerators on Plastic Substrates as Flexible Power Sources for Nanodevices journal January 2007
Piezoelectric Nanogenerators Based on Zinc Oxide Nanowire Arrays journal April 2006

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