Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

CO2 laser and plasma microjet process for improving laser optics

Patent ·
OSTI ID:1174489
A optic is produced for operation at the fundamental Nd:YAG laser wavelength of 1.06 micrometers through the tripled Nd:YAG laser wavelength of 355 nanometers by the method of reducing or eliminating the growth of laser damage sites in the optics by processing the optics to stop damage in the optics from growing to a predetermined critical size. A system is provided of mitigating the growth of laser-induced damage in optics by virtue of very localized removal of glass and absorbing material.
Research Organization:
The Regents of the University of California, Oakland, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
W-7405-ENG-48
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Number(s):
6,620,333
Application Number:
09/978,394
OSTI ID:
1174489
Country of Publication:
United States
Language:
English

References (4)

Etching materials with an atmospheric-pressure plasma jet journal August 1998
An Investigation of Laser Processing of Silica Surfaces book January 1988
Deposition of silicon dioxide films with an atmospheric-pressure plasma jet journal August 1998
Development and application of a microbeam plasma generator journal February 1992

Similar Records

Localized CO2 Laser Treatment for Mitigation of 3(omega) Damage Growth in Fused Silica
Conference · Thu Dec 06 23:00:00 EST 2001 · OSTI ID:15002005

Methods for Mitigating Growth of Laser-Initiated Surface Damage on Fused Silcia Optics at 351nm
Conference · Tue Dec 11 23:00:00 EST 2001 · OSTI ID:15002010

Dual wavelength laser thermal processing of semiconductors
Technical Report · Mon Jun 30 00:00:00 EDT 1980 · OSTI ID:6487689