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Title: Micromachined cutting blade formed from {211}-oriented silicon

Abstract

A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

Inventors:
; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174479
Patent Number(s):
6,615,496
Application Number:
09/564,246
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-L
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Fleming, James G., Sniegowski, Jeffry J., and Montague, Stephen. Micromachined cutting blade formed from {211}-oriented silicon. United States: N. p., 2003. Web.
Fleming, James G., Sniegowski, Jeffry J., & Montague, Stephen. Micromachined cutting blade formed from {211}-oriented silicon. United States.
Fleming, James G., Sniegowski, Jeffry J., and Montague, Stephen. Tue . "Micromachined cutting blade formed from {211}-oriented silicon". United States. https://www.osti.gov/servlets/purl/1174479.
@article{osti_1174479,
title = {Micromachined cutting blade formed from {211}-oriented silicon},
author = {Fleming, James G. and Sniegowski, Jeffry J. and Montague, Stephen},
abstractNote = {A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 09 00:00:00 EDT 2003},
month = {Tue Sep 09 00:00:00 EDT 2003}
}

Patent:

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