U.S. Department of EnergyOffice of Scientific and Technical Information
Micromachined cutting blade formed from {211}-oriented silicon
Abstract
A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).
- Inventors:
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174479
- Patent Number(s):
- 6,615,496
- Application Number:
- 09/564,246
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Fleming, James G., Sniegowski, Jeffry J., and Montague, Stephen. Micromachined cutting blade formed from {211}-oriented silicon. United States: N. p., 2003.
Web.
Fleming, James G., Sniegowski, Jeffry J., & Montague, Stephen. Micromachined cutting blade formed from {211}-oriented silicon. United States.
Fleming, James G., Sniegowski, Jeffry J., and Montague, Stephen. 2003.
"Micromachined cutting blade formed from {211}-oriented silicon". United States. https://www.osti.gov/servlets/purl/1174479.
@article{osti_1174479,
title = {Micromachined cutting blade formed from {211}-oriented silicon},
author = {Fleming, James G. and Sniegowski, Jeffry J. and Montague, Stephen},
abstractNote = {A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).},
doi = {},
url = {https://www.osti.gov/biblio/1174479},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 09 00:00:00 EDT 2003},
month = {Tue Sep 09 00:00:00 EDT 2003}
}
Works referenced in this record:
Stress relaxation and thermal evolution of film properties in amorphous carbon
journal, September 1997
- Sullivan, J. P.; Friedmann, T. A.; Baca, A. G.
- Journal of Electronic Materials, Vol. 26, Issue 9