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Title: Micromachined cutting blade formed from {211}-oriented silicon

Abstract

A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).

Inventors:
 [1];  [2];  [3];  [1]
  1. Albuquerque, NM
  2. (Burbank, CA)
  3. Tijeras, NM
Publication Date:
Research Org.:
Sandia National Laboratories
Sponsoring Org.:
USDOE
OSTI Identifier:
1026664
Patent Number(s):
7,992,309
Application Number:
10/421,025
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Fleming, James G, Fleming, legal representative, Carol, Sniegowski, Jeffry J, and Montague, Stephen. Micromachined cutting blade formed from {211}-oriented silicon. United States: N. p., 2011. Web.
Fleming, James G, Fleming, legal representative, Carol, Sniegowski, Jeffry J, & Montague, Stephen. Micromachined cutting blade formed from {211}-oriented silicon. United States.
Fleming, James G, Fleming, legal representative, Carol, Sniegowski, Jeffry J, and Montague, Stephen. Tue . "Micromachined cutting blade formed from {211}-oriented silicon". United States. https://www.osti.gov/servlets/purl/1026664.
@article{osti_1026664,
title = {Micromachined cutting blade formed from {211}-oriented silicon},
author = {Fleming, James G and Fleming, legal representative, Carol and Sniegowski, Jeffry J and Montague, Stephen},
abstractNote = {A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 09 00:00:00 EDT 2011},
month = {Tue Aug 09 00:00:00 EDT 2011}
}

Patent:

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