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Title: Method for producing fluorinated diamond-like carbon films

Abstract

Fluorinated, diamond-like carbon (F-DLC) films are produced by a pulsed, glow-discharge plasma immersion ion processing procedure. The pulsed, glow-discharge plasma was generated at a pressure of 1 Pa from an acetylene (C.sub.2 H.sub.2) and hexafluoroethane (C.sub.2 F.sub.6) gas mixture, and the fluorinated, diamond-like carbon films were deposited on silicon <100>substrates. The film hardness and wear resistance were found to be strongly dependent on the fluorine content incorporated into the coatings. The hardness of the F-DLC films was found to decrease considerably when the fluorine content in the coatings reached about 20%. The contact angle of water on the F-DLC coatings was found to increase with increasing film fluorine content and to saturate at a level characteristic of polytetrafluoroethylene.

Inventors:
; ; ;
Publication Date:
Research Org.:
The Regents of the University of California, Los Alamos, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174351
Patent Number(s):
6,572,937
Application Number:
09/728,791
Assignee:
The Regents of the University of California (Los Alamos, NM) OSTI
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Hakovirta, Marko J., Nastasi, Michael A., Lee, Deok-Hyung, and He, Xiao-Ming. Method for producing fluorinated diamond-like carbon films. United States: N. p., 2003. Web.
Hakovirta, Marko J., Nastasi, Michael A., Lee, Deok-Hyung, & He, Xiao-Ming. Method for producing fluorinated diamond-like carbon films. United States.
Hakovirta, Marko J., Nastasi, Michael A., Lee, Deok-Hyung, and He, Xiao-Ming. Tue . "Method for producing fluorinated diamond-like carbon films". United States. doi:. https://www.osti.gov/servlets/purl/1174351.
@article{osti_1174351,
title = {Method for producing fluorinated diamond-like carbon films},
author = {Hakovirta, Marko J. and Nastasi, Michael A. and Lee, Deok-Hyung and He, Xiao-Ming},
abstractNote = {Fluorinated, diamond-like carbon (F-DLC) films are produced by a pulsed, glow-discharge plasma immersion ion processing procedure. The pulsed, glow-discharge plasma was generated at a pressure of 1 Pa from an acetylene (C.sub.2 H.sub.2) and hexafluoroethane (C.sub.2 F.sub.6) gas mixture, and the fluorinated, diamond-like carbon films were deposited on silicon <100>substrates. The film hardness and wear resistance were found to be strongly dependent on the fluorine content incorporated into the coatings. The hardness of the F-DLC films was found to decrease considerably when the fluorine content in the coatings reached about 20%. The contact angle of water on the F-DLC coatings was found to increase with increasing film fluorine content and to saturate at a level characteristic of polytetrafluoroethylene.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 03 00:00:00 EDT 2003},
month = {Tue Jun 03 00:00:00 EDT 2003}
}

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