Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane

Tong, Yuhan; Zahedian, Maryam; Zeng, Aiping; Vidrio, Ricardo; Efremov, Mike; Yin, Shenwei; Mei, Hongyan; Heaney, Patrick J.; Choy, Jennifer T.

doi:10.1016/j.diamond.2025.112365

Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane

Journal Article · Mon May 05 00:00:00 EDT 2025 · Diamond and Related Materials

DOI:https://doi.org/10.1016/j.diamond.2025.112365· OSTI ID:3015771

Tong, Yuhan ^[1]; Zahedian, Maryam ^[1]; Zeng, Aiping ^[2]; Vidrio, Ricardo ^[1]; Efremov, Mike ^[3]; Yin, Shenwei ^[1]; Mei, Hongyan ^[1]; Heaney, Patrick J. ^[2]; Choy, Jennifer T. ^[1]

Univ. of Wisconsin, Madison, WI (United States)
NCD Technologies, Madison, WI (United States)
NCD Technologies, Madison, WI (United States); Univ. of Wisconsin, Madison, WI (United States)

Here, we demonstrate an environmentally friendly and scalable method to create fluorine-doped diamond-like carbon (F-DLC) coatings using plasma immersion ion implantation plasma-enhanced chemical vapor deposition (PIII-PECVD) with 1,1,1,2-tetrafluoroethane. F-DLC films tend to have low wettability and good mechanical flexibility, which make them suitable for applications in biomedical devices and antibiofouling surfaces. We report on the effects of fluorine incorporation on the surface chemistry, surface energy, and morphology of these coatings, showing that our method is effective in increasing the fluorine content in the F-DLC up to 40%. We show that the addition of fluorine leads to a decrease in surface energy, which is consistent with a reduction in surface wettability.

View Accepted Manuscript (DOE)

Research Organization:: Univ. of Wisconsin, Madison, WI (United States)

Sponsoring Organization:: National Science Foundation; USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0020313; SC0023873

OSTI ID:: 3015771

Journal Information:: Diamond and Related Materials, Journal Name: Diamond and Related Materials Vol. 156; ISSN 0925-9635

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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Contact angle
F-DLC surface
Roughness
Surface free energy

Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane

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