Fabrication and characterization of Sb/B4C multilayer mirrors for soft X-rays

Kopylets, Igor A.; Kondratenko, V. V.; Zubarev, E. N.; Voronov, D. L.; Gullikson, E. M.; Vishnyakov, E. A.; Ragozin, E. N.

doi:10.1016/j.apsusc.2014.04.038

Fabrication and characterization of Sb/B4C multilayer mirrors for soft X-rays

Journal Article · Tue Jul 01 04:00:00 EDT 2014 · Applied Surface Science

DOI:https://doi.org/10.1016/j.apsusc.2014.04.038· OSTI ID:1163221

Kopylets, Igor A.; Kondratenko, V. V.; Zubarev, E. N.; Voronov, D. L.; Gullikson, E. M.; Vishnyakov, E. A.; Ragozin, E. N.

Structure characterization of Sb/B₄C multilayers for soft X-ray optics with a layers thickness from 0.5 nm to 7 nm is reported for the first time. Sb/B₄C coatings were manufactured via magnetron sputtering. Amorphous and crystalline phases of the layers and the multilayer structure parameters were characterized with the X-ray diffraction data and the TEM data. The Sb/B₄C multilayers demonstrated long term stability of their parameters and performances. The reached value of the reflectance of the Sb/B₄C multilayers is 19–28% measured at the near-normal incidence in the wavelength range of 6.64–8.5 nm. The influence of reduced Sb density on the reflectivity is discussed.

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC02-05CH11231

OSTI ID:: 1163221

Report Number(s):: LBNL--6803E

Journal Information:: Applied Surface Science, Journal Name: Applied Surface Science Vol. 307; ISSN 0169-4332

Publisher:: Elsevier

Country of Publication:: United States

Language:: English

References (13)

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