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Title: Formation and evolution of ripples on ion-irradiated semiconductor surfaces

Journal Article · · Appl. Phys. Lett.
DOI:https://doi.org/10.1063/1.4863471· OSTI ID:1161254
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Research Organization:
Energy Frontier Research Centers (EFRC) (United States). Center for Solar and Thermal Energy Conversion (CSTEC)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
SC0000957
OSTI ID:
1161254
Journal Information:
Appl. Phys. Lett., Vol. 104; Related Information: CSTEC partners with University of Michigan (lead); Kent State University
Country of Publication:
United States
Language:
English

References (25)

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Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering journal June 2007
Highly ordered nanopatterns on Ge and Si surfaces by ion beam sputtering journal May 2009
Multiple Bifurcation Types and the Linear Dynamics of Ion Sputtered Surfaces journal December 2008
The shape and ordering of self-organized nanostructures by ion sputtering journal February 2004
Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces journal February 2011
A multiscale crater function model for ion-induced pattern formation in silicon journal May 2009
Is keV ion-induced pattern formation on Si(001) caused by metal impurities? journal January 2010
Surface roughness development during sputtering of GaAs and InP: Evidence for the role of surface diffusion in ripple formation and sputter cone development
  • MacLaren, S. W.; Baker, J. E.; Finnegan, N. L.
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journal May 1992
Real-time observation of FIB-created dots and ripples on GaAs journal December 2007
Theory of ripple topography induced by ion bombardment journal July 1988
Compositionally Modulated Ripples Induced by Sputtering of Alloy Surfaces journal June 2007
Spontaneous Pattern Formation Induced by Ion Bombardment of Binary Compounds journal October 2010
Mechanisms of pattern formation and smoothing induced by ion-beam erosion journal October 2008
Ripple formation and smoothening on insulating surfaces journal May 2009
Focused ion beam sputter yield change as a function of scan speed journal November 1997
Mechanisms of nanorod growth on focused-ion-beam-irradiated semiconductor surfaces: Role of redeposition journal January 2012
Effects of buffer layers on the structural and electronic properties of InSb films journal February 2005
Recent developments in micromilling using focused ion beam technology journal January 2004
Surfactant Sputtering: Theory of a new method of surface nanostructuring by ion beams
  • Kree, R.; Yasseri, T.; Hartmann, A. K.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 267, Issue 8-9 https://doi.org/10.1016/j.nimb.2009.01.150
journal May 2009
Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface journal May 2007
Lateral templating of self-organized ripple morphologies during focused ion beam milling of Ge
  • Ichim, Stefan; Aziz, Michael J.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 3 https://doi.org/10.1116/1.1897711
journal January 2005
Real-time observation of ripple structure formation on a diamond surface under focused ion-beam bombardment journal March 2001
Dual-beam focused ion beam/electron microscopy processing and metrology of redeposition during ion–surface 3D interactions, from micromachining to self-organized picostructures journal May 2009
Self-sustained etch masking: A general concept to initiate the formation of nanopatterns during ion erosion journal November 2009

Cited By (2)

Ion irradiation of III–V semiconductor surfaces: From self-assembled nanostructures to plasmonic crystals journal December 2019
Nanoporous Structure Formation in GaSb, InSb, and Ge by Ion Beam Irradiation under Controlled Point Defect Creation Conditions journal July 2017

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solar (photovoltaic)
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synthesis (self-assembly)