Formation and evolution of ripples on ion-irradiated semiconductor surfaces

Kang, M.; Wu, J. H.; Ye, W.; Jiang, Y.; Robb, E. A.; Chen, C.; Goldman, R. S.

doi:10.1063/1.4863471

Title: Formation and evolution of ripples on ion-irradiated semiconductor surfaces

Journal Article · Thu Feb 06 00:00:00 EST 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4863471· OSTI ID:1383302

Kang, M. ^[1]; Wu, J. H. ^[1]; Ye, W. ^[1]; Jiang, Y. ^[1]; Robb, E. A. ^[1]; Chen, C. ^[1]; Goldman, R. S. ^[1]

Univ. of Michigan, Ann Arbor, MI (United States)

We have examined the formation and evolution of ripples on focused-ion-beam (FIB) irradiated compound semiconductor surfaces. Using initially normal-incidence Ga⁺ FIB irradiation of InSb, we tuned the local beam incidence angle (θ_eff) by varying the pitch and/or dwell time. For single-pass FIB irradiation, increasing θ_eff induces morphological evolution from pits and islands to ripples to featureless surfaces. Multiple-pass FIB irradiation of the rippled surfaces at a fixed θ_eff leads to island formation on the ripple crests, followed by nanorod (NR) growth. Finally, this ripple-NR transition provides an alternative approach for achieving dense arrays of NRs.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Center for Solar and Thermal Energy Conversion (CSTEC); Univ. of Michigan, Ann Arbor, MI (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0000957

OSTI ID:: 1383302

Journal Information:: Applied Physics Letters, Vol. 104, Issue 5; Related Information: CSTEC partners with University of Michigan (lead); Kent State University; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

Citation Metrics:

Cited by: 14 works

Citation information provided by
Web of Science

References (25)

Compositionally Modulated Ripples Induced by Sputtering of Alloy Surfaces Shenoy, V. B.; Chan, W. L.; Chason, E. Physical Review Letters, Vol. 98, Issue 25 https://doi.org/10.1103/PhysRevLett.98.256101	journal	June 2007
Real-time observation of FIB-created dots and ripples on GaAs Rose, F.; Fujita, H.; Kawakatsu, H. Nanotechnology, Vol. 19, Issue 3 https://doi.org/10.1088/0957-4484/19/03/035301	journal	December 2007
Mechanisms of nanorod growth on focused-ion-beam-irradiated semiconductor surfaces: Role of redeposition Wu, J. H.; Goldman, R. S. Applied Physics Letters, Vol. 100, Issue 5 https://doi.org/10.1063/1.3675641	journal	January 2012
Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface MoberlyChan, Warren J.; Adams, David P.; Aziz, Michael J. MRS Bulletin, Vol. 32, Issue 5 https://doi.org/10.1557/mrs2007.66	journal	May 2007
A multiscale crater function model for ion-induced pattern formation in silicon Kalyanasundaram, N.; Freund, J. B.; Johnson, H. T. Journal of Physics: Condensed Matter, Vol. 21, Issue 22 https://doi.org/10.1088/0953-8984/21/22/224018	journal	May 2009
Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering Facsko, S. Science, Vol. 285, Issue 5433 https://doi.org/10.1126/science.285.5433.1551	journal	September 1999
Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering Chan, Wai Lun; Chason, Eric Journal of Applied Physics, Vol. 101, Issue 12 https://doi.org/10.1063/1.2749198	journal	June 2007
Highly ordered nanopatterns on Ge and Si surfaces by ion beam sputtering Ziberi, B.; Cornejo, M.; Frost, F. Journal of Physics: Condensed Matter, Vol. 21, Issue 22 https://doi.org/10.1088/0953-8984/21/22/224003	journal	May 2009
Theory of ripple topography induced by ion bombardment Bradley, R. Mark; Harper, James M. E. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 6, Issue 4 https://doi.org/10.1116/1.575561	journal	July 1988
Multiple Bifurcation Types and the Linear Dynamics of Ion Sputtered Surfaces Madi, Charbel S.; Davidovitch, Benny; George, H. Bola Physical Review Letters, Vol. 101, Issue 24 https://doi.org/10.1103/PhysRevLett.101.246102	journal	December 2008
Is keV ion-induced pattern formation on Si(001) caused by metal impurities? Macko, Sven; Frost, Frank; Ziberi, Bashkim Nanotechnology, Vol. 21, Issue 8 https://doi.org/10.1088/0957-4484/21/8/085301	journal	January 2010
Surface roughness development during sputtering of GaAs and InP: Evidence for the role of surface diffusion in ripple formation and sputter cone development MacLaren, S. W.; Baker, J. E.; Finnegan, N. L. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 10, Issue 3 https://doi.org/10.1116/1.578173	journal	May 1992
Mass Redistribution Causes the Structural Richness of Ion-Irradiated Surfaces Madi, Charbel S.; Anzenberg, Eitan; Ludwig, Karl F. Physical Review Letters, Vol. 106, Issue 6 https://doi.org/10.1103/PhysRevLett.106.066101	journal	February 2011
Surfactant Sputtering: Theory of a new method of surface nanostructuring by ion beams Kree, R.; Yasseri, T.; Hartmann, A. K. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 267, Issue 8-9 https://doi.org/10.1016/j.nimb.2009.01.150	journal	May 2009
Self-sustained etch masking: A general concept to initiate the formation of nanopatterns during ion erosion Le Roy, S.; Barthel, E.; Brun, N. Journal of Applied Physics, Vol. 106, Issue 9 https://doi.org/10.1063/1.3243333	journal	November 2009
Focused ion beam sputter yield change as a function of scan speed Santamore, D. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6 https://doi.org/10.1116/1.589643	journal	November 1997
Ripple formation and smoothening on insulating surfaces Headrick, Randall L.; Zhou, Hua Journal of Physics: Condensed Matter, Vol. 21, Issue 22 https://doi.org/10.1088/0953-8984/21/22/224005	journal	May 2009
Real-time observation of ripple structure formation on a diamond surface under focused ion-beam bombardment Datta, A.; Wu, Yuh-Renn; Wang, Y. L. Physical Review B, Vol. 63, Issue 12 https://doi.org/10.1103/PhysRevB.63.125407	journal	March 2001
Recent developments in micromilling using focused ion beam technology Tseng, Ampere A. Journal of Micromechanics and Microengineering, Vol. 14, Issue 4, p. R15-R34 https://doi.org/10.1088/0960-1317/14/4/R01	journal	January 2004
Dual-beam focused ion beam/electron microscopy processing and metrology of redeposition during ion–surface 3D interactions, from micromachining to self-organized picostructures MoberlyChan, Warren J. Journal of Physics: Condensed Matter, Vol. 21, Issue 22 https://doi.org/10.1088/0953-8984/21/22/224013	journal	May 2009
Mechanisms of pattern formation and smoothing induced by ion-beam erosion Zhou, Hua; Zhou, Lan; Özaydin, Gözde Physical Review B, Vol. 78, Issue 16 https://doi.org/10.1103/PhysRevB.78.165404	journal	October 2008
The shape and ordering of self-organized nanostructures by ion sputtering Frost, F.; Ziberi, B.; Höche, T. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 216 https://doi.org/10.1016/j.nimb.2003.11.014	journal	February 2004
Effects of buffer layers on the structural and electronic properties of InSb films Weng, X.; Rudawski, N. G.; Wang, P. T. Journal of Applied Physics, Vol. 97, Issue 4 https://doi.org/10.1063/1.1841466	journal	February 2005
Spontaneous Pattern Formation Induced by Ion Bombardment of Binary Compounds Bradley, R. Mark; Shipman, Patrick D. Physical Review Letters, Vol. 105, Issue 14 https://doi.org/10.1103/PhysRevLett.105.145501	journal	October 2010
Lateral templating of self-organized ripple morphologies during focused ion beam milling of Ge Ichim, Stefan; Aziz, Michael J. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 3 https://doi.org/10.1116/1.1897711	journal	January 2005

Cited By (2)

Ion irradiation of III–V semiconductor surfaces: From self-assembled nanostructures to plasmonic crystals Kang, M.; Goldman, R. S. Applied Physics Reviews, Vol. 6, Issue 4 https://doi.org/10.1063/1.5079908	journal	December 2019
Nanoporous Structure Formation in GaSb, InSb, and Ge by Ion Beam Irradiation under Controlled Point Defect Creation Conditions Yanagida, Yusuke; Oishi, Tomoya; Miyaji, Takashi Nanomaterials, Vol. 7, Issue 7 https://doi.org/10.3390/nano7070180	journal	July 2017

Similar Records

Formation and evolution of ripples on ion-irradiated semiconductor surfaces

Journal Article · Mon Feb 03 00:00:00 EST 2014 · Applied Physics Letters · OSTI ID:1383302

Kang, M.; Wu, J. H.; Ye, W.; +3 more

Mechanisms of nanorod growth on focused-ion-beam-irradiated semiconductor surfaces: Role of redeposition

Journal Article · Mon Jan 30 00:00:00 EST 2012 · Applied Physics Letters · OSTI ID:1383302

Wu, J H; Goldman, R S

Propagation of Surface Ripples on Pyrochlore Single Crystals Induced by Ion Beam Bombardment

Journal Article · Thu Jan 01 00:00:00 EST 2009 · Physical Review B · OSTI ID:1383302

Wei, Q. M.; Lian, Jie; Boatner, Lynn A; +2 more

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
77 NANOSCIENCE AND NANOTECHNOLOGY
solar (photovoltaic)
solar (thermal)
phonons
thermal conductivity
thermoelectric
electrodes - solar
defects
charge transport
materials and chemistry by design
optics
synthesis (novel materials)
synthesis (self-assembly)

Title: Formation and evolution of ripples on ion-irradiated semiconductor surfaces

Citation Formats

References (25)

Cited By (2)

Similar Records

Related Subjects