Formation and evolution of ripples on ion-irradiated semiconductor surfaces
We have examined the formation and evolution of ripples on focused-ion-beam (FIB) irradiated compound semiconductor surfaces. Using initially normal-incidence Ga{sup +} FIB irradiation of InSb, we tuned the local beam incidence angle (θ{sub eff}) by varying the pitch and/or dwell time. For single-pass FIB irradiation, increasing θ{sub eff} induces morphological evolution from pits and islands to ripples to featureless surfaces. Multiple-pass FIB irradiation of the rippled surfaces at a fixed θ{sub eff} leads to island formation on the ripple crests, followed by nanorod (NR) growth. This ripple-NR transition provides an alternative approach for achieving dense arrays of NRs.
- OSTI ID:
- 22283226
- Journal Information:
- Applied Physics Letters, Vol. 104, Issue 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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