Embedded micromechanical devices for the monolithic integration of MEMS and CMOS
Short communication.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 114489
- Report Number(s):
- SAND--95-1508C; CONF-951213--1; ON: DE95015091
- Country of Publication:
- United States
- Language:
- English
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