Controlled Synthesis of 3D Nanostructures using Proximity-Field Nanopatterning Lithography and Graded Temperature ALD.

Conference · Wed Oct 01 00:00:00 EDT 2008

DOI:https://doi.org/10.1149/1.2979991· OSTI ID:1142500

Grubbs, Robert K.; Bogart, Katherine; El-Kady, Ihab F; Rahimian, Kamyar; Ellis, A. Robert; Sanchez, Amelia M.; Sanchez, Amelia M.; Wiwi, Michael; Su, C; Christodoulou, C; Reda-Taha, M; Shir, D. L.; Rogers, J. A.

Abstract not provided.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1142500
• Report Number(s): SAND2008-6952C; 508965
• Resource Relation: Journal Volume: 16; Conference: Proposed for presentation at the 214th ECS Meeting held October 12-17, 2008 in Honolulu, HI.
• Country of Publication: United States
• Language: English