Controlled Synthesis of 3D Nanostructures Using Proximity-Field NanoPatterning Lithography and Graded Temperature ALD.

Conference · Tue Jul 01 00:00:00 EDT 2008

DOI:https://doi.org/10.1149/1.2979991· OSTI ID:1143171

Grubbs, Robert K.; Ellis, A. Robert; Sanchez, Amelia M.; El-Kady, Ihab F; Bogart, Katherine; Su, Mehmet F.; Christodolulou, C.; Taha, M.; Shir, D. L.; Rogers, J. A.

Abstract not provided.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1143171
• Report Number(s): SAND2008-4750C; 516669
• Resource Relation: Journal Volume: 16; Conference: Proposed for presentation at the Pacific Rim Meeting on Electrochemical and Solid-state Science held October 12-17, 2008 in Honolulu, HI.
• Country of Publication: United States
• Language: English