Controlled Synthesis of 3D Nanostructures using Proximity-Field Nanopatterning Lithography and Graded Temperature ALD.
Abstract
Abstract not provided.
- Authors:
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1142500
- Report Number(s):
- SAND2008-6952C
508965
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Conference
- Resource Relation:
- Journal Volume: 16; Conference: Proposed for presentation at the 214th ECS Meeting held October 12-17, 2008 in Honolulu, HI.
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Grubbs, Robert K., Bogart, Katherine, El-Kady, Ihab F, Rahimian, Kamyar, Ellis, A. Robert, Sanchez, Amelia M., Sanchez, Amelia M., Wiwi, Michael, Su, C, Christodoulou, C, Reda-Taha, M, Shir, D. L., and Rogers, J. A. Controlled Synthesis of 3D Nanostructures using Proximity-Field Nanopatterning Lithography and Graded Temperature ALD.. United States: N. p., 2008.
Web. doi:10.1149/1.2979991.
Grubbs, Robert K., Bogart, Katherine, El-Kady, Ihab F, Rahimian, Kamyar, Ellis, A. Robert, Sanchez, Amelia M., Sanchez, Amelia M., Wiwi, Michael, Su, C, Christodoulou, C, Reda-Taha, M, Shir, D. L., & Rogers, J. A. Controlled Synthesis of 3D Nanostructures using Proximity-Field Nanopatterning Lithography and Graded Temperature ALD.. United States. https://doi.org/10.1149/1.2979991
Grubbs, Robert K., Bogart, Katherine, El-Kady, Ihab F, Rahimian, Kamyar, Ellis, A. Robert, Sanchez, Amelia M., Sanchez, Amelia M., Wiwi, Michael, Su, C, Christodoulou, C, Reda-Taha, M, Shir, D. L., and Rogers, J. A. 2008.
"Controlled Synthesis of 3D Nanostructures using Proximity-Field Nanopatterning Lithography and Graded Temperature ALD.". United States. https://doi.org/10.1149/1.2979991. https://www.osti.gov/servlets/purl/1142500.
@article{osti_1142500,
title = {Controlled Synthesis of 3D Nanostructures using Proximity-Field Nanopatterning Lithography and Graded Temperature ALD.},
author = {Grubbs, Robert K. and Bogart, Katherine and El-Kady, Ihab F and Rahimian, Kamyar and Ellis, A. Robert and Sanchez, Amelia M. and Sanchez, Amelia M. and Wiwi, Michael and Su, C and Christodoulou, C and Reda-Taha, M and Shir, D. L. and Rogers, J. A.},
abstractNote = {Abstract not provided.},
doi = {10.1149/1.2979991},
url = {https://www.osti.gov/biblio/1142500},
journal = {},
number = ,
volume = 16,
place = {United States},
year = {Wed Oct 01 00:00:00 EDT 2008},
month = {Wed Oct 01 00:00:00 EDT 2008}
}
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