Removing a sheet from the surface of a melt using elasticity and buoyancy
Patent
·
OSTI ID:1136751
Embodiments related to sheet production are disclosed. A melt of a material is cooled to form a sheet of the material on the melt. The sheet is formed in a first region at a first sheet height. The sheet is translated to a second region such that it has a second sheet height higher than the first sheet height. The sheet is then separated from the melt. A seed wafer may be used to form the sheet.
- Research Organization:
- Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (USA).
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0000595
- Assignee:
- Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
- Patent Number(s):
- 8,764,901
- Application Number:
- 13/039,808
- OSTI ID:
- 1136751
- Country of Publication:
- United States
- Language:
- English
Investigation of the meniscus stability in horizontal crystal ribbon growth
|
journal | September 1980 |
Improvements in the Horizontal Ribbon Growth technique for single crystal silicon
|
journal | September 1980 |
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